ICFICE 2019
Current Result Document :
| 한글제목(Korean Title) |
Electrical Characteristic of Monolithic 3D Inverter Consisting of JLFET with Interface Charge |
| 영문제목(English Title) |
Electrical Characteristic of Monolithic 3D Inverter Consisting of JLFET with Interface Charge |
| 저자(Author) |
Tae-Jun Ahn
Jong Ho Lee
Young Baek Kim
Yun Seop Yu
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| 원문수록처(Citation) |
VOL 11 NO. 01 PP. 0024 ~ 0026 (2019. 06) |
한글내용
(Korean Abstract) |
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영문내용
(English Abstract) |
In this paper, we investigated the effect of interface trap charge generated by process thermal on monolithic three-dimensional (3D) inverter (M3DINV) with junctionless fieldeffect transistor (JLFET). The current-voltage characteristics of M3DINV with JLFET was simulated with TCAD simulator. Due to the interface trap charge, the current level decreased and the threshold voltage changed.
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| 키워드(Keyword) |
Monolithic 3D IC
JLFET
Interface trap charge
M3DINV
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| 파일첨부 |
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